In this particular paper, the new lapping slurry and polishing slurry are released. Plus the deliquescence diploma of CLBO is fallen to least expensive. A completely new Operating engineering can be adopted. Immediately after tough polishing, the focus of extremely-precision sharpening slurry is improved appropriately. So does the ultra-precision sprucing speed, and the wiping pace is quicker compared to deliquescence speed. The CLBO crystal floor roughness can accomplish 1nm and maintain the area good quality well. Accessibility by way of your institution
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We summarized The present growth status with the significant-energy DUV laser both of those in the wavelength of FHG in the one-μm laser and at 193 nm. The latest advancement of the good-condition/fiber laser, plus the nonlinear optical crystals, prompts don't just the average energy but additionally the beam top quality (coherence) in the DUV lasers to an unparalleled amount.
The normal electrical power of your NIR laser nevertheless has the opportunity for being enhanced to tens of watts such as 70 W [26] In the event the double-move configuration could be utilized for the Yb:YAG SCF amplifier phase. Therefore, Should the conversion efficiency of 31% from NIR to DUV may be still maintained at this larger electricity affliction, the normal output ability on the DUV laser at 258 nm can click here be much more than twenty W, which might become a impressive electricity degree for the DUV laser and cause the unanticipated DUV laser machining benefits. Additionally, for prime-power DUV laser, the UV injury of the nonlinear crystal, including the windows for CLBO crystal and also the mirrors, is another critical parameter for long-term and secure Procedure.
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Both of those the 1040 nm and 1078 nm laser originate from one particular twin-wavelength Yb-doped fiber laser. Just about every laser is amplified by levels of fiber amplifier and Yb-doped elements amplifier, respectively.
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Tunable ultraviolet laser supply determined by stable-point out dye laser technological know-how and CsLiB6O10 harmonic technology
The conversion performance from basic NIR to DUV is from five% to 36% based on the noted brings about Table one. Rising the conversion efficiency will decrease the burden on the design and setup of the elemental laser amplifier plus the electric electric power consumption. An excellent beam high-quality of the fundamental laser can even add towards the rising of your conversion efficiency along with the suitable electric power depth from the NIR and eco-friendly laser from the SHG and FHG system, respectively. The best conversion efficiencies from NIR to environmentally friendly and environmentally friendly to DUV laser by usage of CLBO crystal are 70% and all-around fifty%, respectively [twelve], which corresponds on the conversion effectiveness of 35% from essential to DUV.
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